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Electron Beam Lithography (EBL) Tool

Lunds universitet

Uppskattat värde
26 mnkr
Plats
Skåne
Typ av kontrakt
Varor
  1. Publicerad 7 okt
  2. Sista dag för anbud 5 nov kl. 23.59, om 27 dagar
  3. Tilldelad –

Förra gången köparen upphandlade laboratorieutrustning, optisk utrustning och precisionsutrustning (exkl. glas) vann VWR International AB (2026, 6 anbud, 950 000 kr).

Läs annonsen på TEDUpphandlingsdokument · Lägg till i kalendern

Om upphandlingen

Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing.

Läs hela beskrivningen

With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.

Detaljer

Förfarande
Öppet förfarande
CPV-koder
  • 38000000 Laboratorieutrustning, optisk utrustning och precisionsutrustning (exkl. glas)
TED-nummer
690718-2026

Sammanfattning av annonsen i TED. Den officiella annonsen och upphandlingsdokumenten gäller.

Uppdaterad 9 okt 23:27Källa: TED, EU:s publikationsbyrå